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Nano-HS Series
Nano-HS2 Drawing
Nano-HS3 Drawing
Catalog Pages
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Questions?
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Features
High speed, multi-axis
XY and XYZ configurations
Z-axis step response time down to 2ms
Z-axis scans up to 300 Hz
Closed loop control
Picometer positioning resolution
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Typical Applications
High speed, high resolution positioning
Metrology
AFM
SPM |
 
Product Description |
The Nano-HS Series is a high speed, multi-axis, precision
nanopositioning system with picometer positioning resolution.
Offering maximum versatility, the Nano-HS can
be configured to provide XY or XYZ motion. Internal
position sensors utilizing proprietary PicoQ™ technology
provide absolute, repeatable position measurement under
closed loop control. The compact footprint, ultra-low
noise characteristics, and a Z-axis resonant frequency
of 5kHz make it ideal for metrology applications that
require noise floors less than 10 picometers and/or high
speed performance.
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Technical Specifications |
| Range of motion (XYZ) |
10 μm |
Resolution
|
0.01 nm |
| XY (HS2) Resonant Frequency |
1.5 kHz ±20% |
| XY (HS3) Resonant Frequency |
1.0 kHz ±20% |
| Z (HS3) Resonant Frequency |
5.0 kHz ±20% |
| Scanning Speed |
up to 300 Hz |
| Stiffness (Z-axis) |
8 N/μm |
| Recommended max. load (horizontal)* |
0.1 kg |
| Recommended max. load (vertical)* |
0.1 kg |
| Body Material |
Al, Invar or Titanium |
| Controller |
Nano-Drive™ |
| * Larger load requirements should be discussed with our engineering staff. |
Position Noise Spectrum |
| The Nano-HS Series demonstrates less than 2 picometers of position noise. Click below to enlarge and view the data for all three axes. |
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