>>Nano-HS Series
Additinal Information
Drawing (HS2)
Drawing (HS3)
Catalog Pages
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Features
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Typical Applications
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Product Description |
The Nano-HS Series is a high speed, multi-axis, precision
nanopositioning system with picometer positioning resolution.
Offering maximum versatility, the Nano-HS can
be configured to provide XY or XYZ motion. Internal
position sensors utilizing proprietary PicoQ® technology
provide absolute, repeatable position measurement under
closed loop control. The compact footprint, ultra-low
noise characteristics, and a Z-axis resonant frequency
of 5kHz make it ideal for metrology applications that
require noise floors less than 10 picometers and/or high
speed performance. |
Technical Specifications |
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| Range of motion (XYZ) | 10 μm |
| Resolution |
0.01 nm |
| XY (HS2) Resonant Frequency | 1.5 kHz ±20% |
| XY (HS3) Resonant Frequency | 1.0 kHz ±20% |
| Z (HS3) Resonant Frequency | 5.0 kHz ±20% |
| Scanning Speed | up to 300 Hz |
| Stiffness (Z-axis) | 8 N/μm |
| Recommended max. load (horizontal)* | 0.1 kg |
| Recommended max. load (vertical)* | 0.1 kg |
| Body Material | Al, Invar or Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Position Noise Spectrum |
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| The Nano-HS Series demonstrates less than 2 picometers of position noise. Click below to enlarge and view the data for all three axes. | ||
Additional Information | |
Nano-HS2 Drawing Nano-HS3 Drawing  |
Nano-HS Series Catalog Pages |
Related Products |
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