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Related Products
Nano-MET Series
Nano-MET10 & Nano-MET20
Nano-HS Series
MMP Series
SPM Accessories
SPM-M Kit®

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  • High speed 3 axis piezo nanopositioner
  • Low noise floor
  • Closed loop control
  • Picometer positioning resolution
  • High stability
  • Compact design

Typical Applications
  • High speed, high resolution positioning
  • Metrology
  • AFM
  • SPM

Product Description

The Nano-HS3M is a high speed, XYZ precision piezo nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano- HS3M is designed for demanding metrology applications. Internal position sensors utilizing proprietary PicoQ®technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 13.5kHz make it ideal for metrology applications that require picometer noise floors and high speed performance.

Technical Specifications

Range of motion (XY) 10 μm
Range of motion (Z) 5 μm
0.01 nm
Resonant Frequency (X) 1.6 kHz
Resonant Frequency (Y) 1.5 kHz
Resonant Frequency (Z) 13.5 kHz
Recommended max. load (horizontal)* 0.1 kg
Recommended max. load (vertical)* 0.1 kg
Body Material Aluminum or Titanium
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Position Noise Spectrum

The Nano-HS3M demonstrates less than 2 picometers of position noise on all three axes. Click below to enlarge and view the data for each axis.

AFM Verification of PicoQ® Sensor Technology Performance

Position noise of a piezo nanopositioning system is the ultimate limit of the system's measurement resolution. Many applications involving sub-nanometer measurements, such as atomic force microscopy (AFM), would not be possible without low noise piezo nanopositioning systems. The tests below employ a Nano-HS3 for XYZ probe motion and demonstrate the ultra-low position noise and high accuracy of nanopositioning systems with PicoQ® sensor technology.

Some companies claim to sell systems with sub-nanometer resolution, but they do not have data from external metrology tests to support their claims. All Mad City Labs piezo nanopositioning products are rigorously tested before shipment. These tests involve a series of measurements designed to fully characterize the performance of the nanopositioning system with a realistic environment and testing conditions that match the application. Available metrology tools include NIST-traceable interferometers, high resolution AFM, and a high resolution position noise analyzer, designed specifically for nanopositioning characterization. The links below lead to in-depth descriptions of some of our AFM measurements.

2D representation of 312 pm Si (111) atomic steps measured by AFM
312 pm Si (111) atomic steps detected using a nanopositioner with PicoQ® sensor technology, measured by AFM.
AFM Demonstrations: Measuring Atomic Steps
Measurements taken with an AFM show that piezo nanopositioners with PicoQ® sensor technology have sufficiently low position noise to accurately resolve single atomic layer size steps, 312 pm.

AFM Demonstrations: Sub-Nanometer Motion
100 and 450 micron range piezo nanopositioners with PicoQ sensor technology perform 860 picometer steps, 1 nanometer sine wave, and repeated 95 picometer steps, externally measured by AFM.

AFM Demonstrations: Measuring Surface Roughness
AFM is used to externally verify that the position noise of a piezo nanopositioning system with PicoQ® sensor technology is less than the surface roughness of a Si (111) sample, 60 pm RMS.

Additional Information

Nano-HS3M Drawing
Nano-HS3M Catalog Pages

Related Products

mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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