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>>Nano-MET Series

Additional Information
Drawing (2 Axis)
Drawing (3 Axis)
Catalog Pages

Related Products
Nano-PDQ Series
Nano-MET10 and Nano-MET20
SPM Accessories

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  • High speed, multi-axis piezo nanopositioner
  • 2 and 3 axis configurations
  • Closed loop control
  • Ultra-low noise performance
  • Picometer positioning resolution
  • High stability

Typical Applications
  • High speed, high resolution positioning
  • Metrology
  • AFM
  • SPM

Product Description

The Nano-MET2 and Nano-MET3 are ultra-low noise, high precision piezo nanopositioning systems with picometer positioning resolution. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement under closed loop control. The ultra-low position noise (4 picometers/√Hz in XY and 400 femtometers/√Hz in Z) of these piezo nanopositioning systems make them ideal for demanding metrology applications. With a resonant frequency of 13.5kHz, the z-axis of the Nano-MET3 offers ultra-fast response needed for demanding AFM applications. Related products include the Nano-METZ, Nano-MET10 and Nano-MET20 nanopositioning systems.

Technical Specifications

Range of motion (XY) 75 μm
Range of motion (Z)
5 μm
Resolution (XY) 0.15 nm
Resolution (Z) 0.005 nm
Resonant Frequency (XY, Nano-MET2) 1.4 kHz
Resonant Frequency (XY, Nano-MET3)) 1.0 kHz
Resonant Frequency (Z, Nano-MET3) 13.5 kHz
Recommended max. load (horizontal)* 100 g
Recommended max. load (vertical)* 100g
Body Material Aluminum
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Position Noise Spectrum

The Nano-MET Series demonstrates less than 4 picometers/√Hz of position noise on X and Y and less than 400 femtometers/√Hz of position noise on Z. Click below to enlarge and view the data for each axis.

Additional Information

Nano-MET2 Drawing (2 Axis)

Nano-MET3 Drawing (3 Axis)

Nano-MET Series Catalog Pages

Related Products

mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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