Product Description

The Nano-PDQ Series are high speed multi-axis precision nanopositioning systems. The Nano-PDQ Series offers a compact footprint with a large center aperture while still offering fast performance and a resonant frequency greater than 2kHz. The Nano-PDQ Series are ideal for applications that demand high scan rates or large load capacities. When used with the Nano-Drive™85 controller (model numbers with the HS suffix) step response times down to 2 milliseconds are achievable, nearly 10 times the speed of comparable systems! The Nano-PDQ Series features parallel, uncoupled motion in up to three axes and fully integrated position sensors utilizing proprietary PicoQ™ technology to provide absolute, repeatable position measurement and picometer accuracy under closed loop control.

Compatible Software Packages:

Technical Specifications
Range of motion (X)	50 μm/75 μm
Range of motion (Y)	50 μm/75 μm
Range of motion (Z)	50 μm
Resolution (50/75 μm)	0.1/0.15 nm
Resonant Frequency (X)	2.5 kHz ±20%
Resonant Frequency (Y)	1.5 kHz ±20%
Resonant Frequency (Z)	1.0 kHz ±20%
Scanning Speed (full amplitude)	up to 400 Hz
Stiffness	3.0 N/μm
θ _roll, θ _pitch (typical)	≤1 μrad
θ _yaw (typical)	≤3 μrad
Recommended max. load (horizontal)*	0.5 kg
Recommended max. load (vertical)*	0.2 kg
Body Material	Al, Invar or Titanium
Controller	Nano-Drive™/Nano-Drive™85
* Larger load requirements should be discussed with our engineering staff.