Product Description

The Nano-LPQ is an ultra-low profile, high speed, three axis nanopositioning system with 75 microns of travel in XY and 50 microns in Z. Designed to minimize the moving mass, lightweight sample holders are integrated into the stage and represent the only moving component. This unusual design allows the three axes of motion to have matched resonant frequencies and step response times. Equal 3-axis speed is particularly useful for applications like 3D particle tracking. The Nano-LPQ uses internal position sensors utilizing proprietary PicoQ^® technology to provide absolute, repeatable position measurement with sub-nanometer resolution under closed loop control. Another system to consider: the Nano-PDQ Series offer similar high speed positining performance with a larger sample mounting area and higher load capacity.

Compatible Software Packages:

Technical Specifications
Range of motion (XYZ)	75 x 75 x 50 μm
Resolution (X/Y/Z)	0.2/0.2/0.1 nm
Resonant Frequencies (XYZ)	1000 Hz ±20%
Stiffness	1.0 N/μm
θroll , θpitch(typical)	≤1 μrad
θyaw (typical)	≤3 μrad
Recommended max. load (horizontal)*	100 g
Recommended max. load (vertical)*	100 g
Body Material	Al
Controller	Nano-Drive^®85
* Larger load requirements should be discussed with our engineering staff.