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Nano-M350
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Catalog Pages
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Questions?
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Features
Compact size
Three axis motion (XYZ)
50 μm x 50 μm x 25 μm ranges of motion
Center aperture: 0.25"
Closed loop control
|
Typical Applications
Alignment
MEMS
Nanolithography
SEM |
 
Product Description |
The Nano-M350 is a compact three axis (X, Y, Z)
nanopositioning system constructed from aluminum
combined with titanium or constructed completely from
invar for the highest degree of thermal stability. The
compact design of the Nano-M350 allows it to be easily
integrated into existing instrumentation for applications such as nanolithography, SEM. Internal position sensors
utilizing proprietary PicoQ™ technology provide absolute,
repeatable position measurement with picometer accuracy
under closed loop control. The Nano-M350 is
also available in high vacuum (non-bakeable) compatible
models.
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Technical Specifications |
| Range of motion (X) |
50 μm |
Range of motion (Y)
|
50 μm |
| Range of motion (Z) |
25 μm |
| Resolution (25/50 μm) |
0.05/0.1 nm |
| Resonant Frequency (X) |
1 kHz ±20% |
| Resonant Frequency (Y) |
700 Hz ±20% |
| Resonant Frequency (Z) |
700 Hz ±20% |
| Stiffness |
1.0 N/μm |
| θ roll, θ pitch (typical) |
≤1 μrad |
| θ yaw (typical) |
≤3 μrad |
| Recommended max. load (horizontal)* |
0.5 kg |
| Recommended max. load (vertical)* |
0.2 kg |
| Body Material |
Al and Titanium, or Invar |
| Controller |
Nano-Drive™ |
| * Larger load requirements should be discussed with our engineering staff. |
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