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  • Compact piezo nanopositioner
  • Three axis motion (XYZ)
  • 50 μm x 50 μm x 20 μm ranges of motion
  • Closed loop control

Typical Applications
  • Alignment
  • MEMS
  • Nanolithography
  • SEM

Product Description

The Nano-M350 is a compact three axis (X, Y, Z) piezo nanopositioning system constructed from aluminum. The XY travel range is 50 μm and 20 μm in the Z axis under closed loop control. The compact design of the Nano-M350 allows it to be easily integrated into existing instrumentation for applications such as nanolithography, SEM. Internal position sensors utilizing proprietary PicoQ®technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M350 has been designed for high speed performance in the Z-axis while maintaining high precision motion and is also available in high vacuum (non-bakeable) compatible models.

Technical Specifications

Range of motion (X)

50 μm

Range of motion (Y)
50 μm
Range of motion (Z) 20 μm
Resolution (20/50 μm) 0.04/0.1 nm
Resonant Frequency (X) 285 Hz ±20%
Resonant Frequency (Y) 285 Hz ±20%
Resonant Frequency (Z) 1580 Hz ±20%
θ roll, θ pitch (typical) ≤1 μrad
θ yaw (typical) ≤3 μrad
Recommended max. load (horizontal)* 0.5 kg
Recommended max. load (vertical)* 0.2 kg
Body Material Auminum
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Additional Information

Nano-M350 Drawing

Nano-M350 Catalog Pages


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mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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