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Nanopositioners
>>Nano-M250

Additional Information
Drawing
Catalog Pages

Related Products
Nano-SPM200
Nano-M350
Nano-Man5
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Accessories
SPM Accessories
Nano-Drive®

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Features
  • Compact piezo nanopositioner
  • Two axis motion
  • 50 μm x 50 μm ranges of motion
  • Closed loop control


Typical Applications
  • Alignment
  • Nanolithography
  • Scanning microscopy

     

Product Description

The Nano-M250 is a compact, two axis piezo nanopositioning system constructed from aluminum. The small dimensions of the Nano-M250 allow it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M250 is also available in high vacuum and ultra high vacuum compatible models. Custom modifications, including range of motion, are available. Contact your local sales office for more information.



Technical Specifications

Range of motion (XY) 50 μm x 50 μm
Resolution
0.1 nm
Resonant Frequency (X) 370 Hz ±20%
Resonant Frequency (Y) 300 Hz ±20%
Stiffness 1.0 N/μm
θ roll, θ pitch (typical) ≤1 μrad
θ yaw (typical) ≤3 μrad
Recommended max. load (horizontal)* 0.5 kg
Recommended max. load (vertical)* 0.2 kg
Body Material Aluminum
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.


Additional Information

Nano-M250 Drawing

Nano-M250 Catalog Pages


Related Products



mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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