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Nano-M250
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Questions?
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Features
Compact size
Two axis motion
50 μm x 50 μm ranges of motion
0.5 inch aperture
Closed loop control
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Typical Applications
Alignment
Nanolithography
Scanning microscopy
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Product Description |
The Nano-M250 is a compact, two axis nanopositioning
system constructed from titanium or invar. The small
dimensions of the Nano-M250 allow it to be easily integrated
into existing instrumentation for applications such
as nanolithography and SEM. The 0.5” center aperture
provides a convienent optical pathway or feedthrough for
probe assemblies. Internal position sensors utilizing proprietary PicoQ™ technology provide absolute, repeatable
position measurement with picometer accuracy under
closed loop control. The Nano-M250 is also available in
high vacuum and ultra high vacuum compatible models.
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Technical Specifications |
| Range of motion (XY) |
50 μm x 50 μm |
Resolution
|
0.1 nm |
| Resonant Frequency (X) |
1.0 kHz ±20% |
| Resonant Frequency (Y) |
700 Hz ±20% |
| Stiffness |
1.0 N/μm |
| θ roll, θ pitch (typical) |
≤1 μrad |
| θ yaw (typical) |
≤3 μrad |
| Recommended max. load (horizontal)* |
0.5 kg |
| Recommended max. load (vertical)* |
0.2 kg |
| Body Material |
Invar or Titanium |
| Controller |
Nano-Drive™ |
| * Larger load requirements should be discussed with our engineering staff. |
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