Up
Nano-Man5
Drawing
Catalog Pages
Related Products
Nano-Align5 Series
Nano-Align3 Series
Nano-M3Z
Nano-M250
Nano-M350
Questions?
E-Mail Us |
Features
Compact size
Five axis motion (XYZ θX θY)
50 μm x 50 μm x 25 μm x 1mrad x 1mrad
ranges of motion
Center aperture: 0.25"
Closed loop control
|
Typical Applications
Alignment
MEMS
Nanolithography
SEM
|
 
Product Description |
The Nano-Man5 is a five axis (X, Y, Z, θX , θY) nanopositioning
system with a 0.25” diameter center aperture.
The compact design of the Nano-Man5 allows it to be
easily integrated into existing instrumentation for applications
such as nanolithography, SEM. The Nano-Man5
is ideal for alignment applications which require three
linear axes of motion combined with “tip” and “tilt”
(θXθY). Internal position sensors utilizing proprietary PicoQ™ technology provide absolute, repeatable position
measurement with picometer and nanoradian accuracy
under closed loop control. The Nano-Man5 is also
available in high vacuum (non-bakeable) compatible
models. Similar to the Nano-Man5, the Nano-M350
shares the same physical dimensions but has only three
axes (XYZ) of motion.
 |
Technical Specifications |
| Range of motion (X) |
50 μm |
Range of motion (Y)
|
50 μm |
| Range of motion (Z) |
25 μm |
| Range of motion (θX) |
1 mradian |
| Range of motion (θY) |
1 mradian |
| Resolution (X) |
0.1 nm |
| Resolution (Y) |
0.1 nm |
| Resolution (Z) |
0.05 nm |
| Resolution (θX) |
2 nradian |
| Resolution (θY) |
2 nradian |
| Resonant Frequency (X) |
1 kHz ±20% |
| Resonant Frequency (Y) |
700 Hz ±20% |
| Resonant Frequency (Z) |
700 Hz ±20% |
| Stiffness |
1.0 N/μm |
| Recommended max. load (horizontal)* |
0.2 kg |
| Recommended max. load (vertical)* |
0.2 kg |
| Body Material |
Al and Titanium, or Invar |
| Controller |
Nano-Drive™ |
| * Larger load requirements should be discussed with our engineering staff. |
|
