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  • Compact piezo nanopositioner
  • Five axis motion (XYZ θX θY)
  • 50 μm x 50 μm x 25 μm x 1mrad x 1mrad
  • ranges of motion
  • Closed loop control

Typical Applications
  • Alignment
  • MEMS
  • Nanolithography
  • SEM

Product Description

The Nano-Man5 is a five axis (X, Y, Z, θX , θY) piezo nanopositioning system with closed loop feedback control for absolutel position measurement. The compact design of the Nano-Man5 allows it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The Nano-Man5 is ideal for alignment applications which require three linear axes of motion combined with “tip” and “tilt” (θXθY). Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. The Nano-Man5 is also available in high vacuum (non-bakeable) compatible models. Similar to the Nano-Man5, the Nano-M350 shares the same physical dimensions but has only three axes (XYZ) of motion.

Technical Specifications

Range of motion (X) 50 μm
Range of motion (Y)
50 μm
Range of motion (Z) 25 μm
Range of motion (θX) 1 mradian
Range of motion (θY) 1 mradian
Resolution (X) 0.1 nm
Resolution (Y) 0.1 nm
Resolution (Z) 0.05 nm
Resolution (θX) 2 nradian
Resolution (θY) 2 nradian
Resonant Frequency (X) 285 Hz ±20%
Resonant Frequency (Y) 235 Hz ±20%
Resonant Frequency (Z) 1580 Hz ±20%
Recommended max. load (horizontal)* 0.2 kg
Recommended max. load (vertical)* 0.2 kg
Body Material Aluminum
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Additional Information

Nano-Man5 Drawing

Nano-Man5 Catalog Pages

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mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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