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Nanopositioners
>>Nano-M3Z

Additional Information
Drawing
Catalog Pages

Related Products
Nano-M250
Nano-M350
Nano-Man5
Nano-MZ
Nano-Align3 Series
Accessories
Nano-Drive®

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Features
  • Compact piezo nanopositioner
  • Three axis motion (Z θX θY)
  • Low profile: 0.76"
  • Closed loop control


Typical Applications
  • Z-axis plus tip/tilt alignment
  • Nanolithography
  • Metrology
  • Nano-alignment


Product Description

The Nano-M3Z is a compact, three axis (Z, θX , θY) piezo nanopositioning system constructed from Aluminum. The compact design of the Nano-M3Z allows it to be integrated into existing instrumentation where space is restricted. The Nano-M3Z is ideal for demanding applications which require precise alignment capabilities. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. A related model, the Nano-Man5, incorporates linear X and Y motion to the capabilities of the Nano-M3Z.



Technical Specifications

Range of motion (Z)

25 μm

Range of motion (θX)
1 mradian
Range of motion (θY) 1 mradian
Resolution (Z) 0.05 nm
Resolution (θX) 2 nradian
Resolution (θY) 2 nradian
Resonant Frequency 500 Hz ±20%
Stiffness 1.0 N/μm
Recommended max. load (horizontal)* 0.5 kg
Recommended max. load (vertical)* 0.2 kg
Body Material Aluminum
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.


Additional Information

Nano-M3Z Drawing

Nano-M3Z Catalog Pages


Related Products



mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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