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Nano-Align3 Series

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  • Compact piezo nanopositioner
  • Three axis motion (Z θX θY)
  • Low profile: 0.76"
  • Closed loop control

Typical Applications
  • Z-axis plus tip/tilt alignment
  • Nanolithography
  • Metrology
  • Nano-alignment

Product Description

The Nano-M3Z is a compact, three axis (Z, θX , θY) piezo nanopositioning system constructed from Aluminum. The compact design of the Nano-M3Z allows it to be integrated into existing instrumentation where space is restricted. The Nano-M3Z is ideal for demanding applications which require precise alignment capabilities. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. A related model, the Nano-Man5, incorporates linear X and Y motion to the capabilities of the Nano-M3Z.

Technical Specifications

Range of motion (Z)

50 μm

Range of motion (θX)
3 mradian
Range of motion (θY) 3 mradian
Resolution (Z) 0.1 nm
Resolution (θX) 6 nradian
Resolution (θY) 6 nradian
Resonant Frequency 100 Hz ±20%
Stiffness 1.0 N/μm
Recommended max. load (horizontal)* 0.2 kg
Recommended max. load (vertical)* 0.05 kg
Body Material Aluminum
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Additional Information

Nano-M3Z Drawing

Nano-M3Z Catalog Pages

Related Products

mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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