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Nano-M3Z
Drawing
Catalog Pages
Related Products
Nano-M250
Nano-M350
Nano-Man5
Nano-MZ
Nano-Align3
Questions?
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Features
Compact design
Three axis motion (Z θX θY)
Low profile: 0.8"
Center aperture: 0.25” diameter
Closed loop control
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Typical Applications
Z-axis plus tip/tilt alignment
Nanolithography
Metrology |
 
Product Description |
The Nano-M3Z is a compact, three axis (Z, θX , θY)
nanopositioning system with a 0.25” center aperture.
The compact design of the Nano-M3Z allows it to be
integrated into existing instrumentation where space
is restricted. The Nano-M3Z is ideal for demanding
applications which require precise alignment capabilities.
Internal position sensors utilizing proprietary
PicoQ™ technology provide absolute, repeatable position
measurement with picometer and nanoradian accuracy
under closed loop control. The center aperture provides
an optical path for laser interferometry or tracking.
Nano-M3Z’s can be constructed from aluminum or
from invar to reduce themal expansion effects. A related
model, the Nano-Man5, adds linear X and Y motion to
the the Z-axis capabilities of the Nano-M3Z.
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Technical Specifications |
| Range of motion (Z) |
25 μm |
Range of motion (θX)
|
1 mradian |
| Range of motion (θY) |
1 mradian |
| Resolution (Z) |
0.05 nm |
| Resolution (θX) |
2 nradian |
| Resolution (θY) |
2 nradian |
| Resonant Frequency |
700 Hz ±20% |
| Stiffness |
1.0 N/μm |
| Recommended max. load (horizontal)* |
0.5 kg |
| Recommended max. load (vertical)* |
0.2 kg |
| Body Material |
Aluminum or Invar |
| Controller |
Nano-Drive™ |
| * Larger load requirements should be discussed with our engineering staff. |
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