Home Products Applications Catalog Custom/OEM Technical Information News International Sales Repairs Contact
   Up

Nano-Align3 Series
   Drawing
   Catalog Pages

Related Products
   Nano-Align5 Series
   Nano-Align6 Series
   Nano-Man5
   Nano-M3Z
   Nano-Z Series
   Accessories
   Nano-Drive®

Questions?
   E-Mail Us


Features
  • Low profile: 0.8"
  • Three axis motion (Z θX θY)
  • Large center aperture: 2.6" x 2.6"
  • Long range: 100 μm or 200 μm (Z), 2mradians or 4mradians (θXθY)
  • Closed loop control


  • Typical Applications
  • Z-axis plus tip/tilt alignment
  • Nanolithography
  • Microscopy
  • MEMS



  • Product Description

    The Nano-Align3 is a three axis (Z, θX , θY) nanopositioning system with a large center aperture. The low profile design of the Nano-Align3 allows it to be integrated into existing instrumentation where space is restricted. The center aperture makes the Nano-Align3 ideal for demanding microscopy alignment applications which require long range travel and high precision. Internal position sensors utilizing proprietary PicoQ® technology provide picometer and nanoradian precision under closed loop control.



    Technical Specifications

    Ranges of motion (Nano-Align3-100)
    Z axis
    100 μm
    θX and θY 2 mradian
    Ranges of motion (Nano-Align3-200)  
    Z axis 200 μm
    θX and θY 4 mradian
    Resolution (Nano-Align3-100) 0.2nm/ 4 nradian
    Resolution (Nano-Align3-200) 0.4nm/ 8 nradian
    Resonant Frequency (Nano-Align3-100) 600 Hz ±20%
    Resonant Frequency (Nano-Align3-200) 450 Hz ±20%
    Stiffness 1.0 N/μm
    Recommended max. load (horizontal)* 0.5 kg
    Recommended max. load (vertical)* 0.2 kg
    Body Material Aluminum, Titanium, or Invar
    Controller Nano-Drive®/Nano-Drive®85
    * Larger load requirements should be discussed with our engineering staff.


    Additional Information

    Nano-Align3 Series Drawing

    Nano-Align3 Series Catalog Pages


    Related Products

  • Nano-Align5 Series
  • Nano-Align6 Series
  • Nano-Man5
  • Nano-M3Z
  • Nano-Z Series
  • Accessories
  • Nano-Drive®


  • mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

    Copyright © 2011