>>Nano-Align3 Series
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Nano-Align5 Series
Nano-Align6 Series
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Features
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Typical Applications
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Product Description |
The Nano-Align3 is a three axis (Z, θX , θY) nanopositioning
system with a large center aperture. The low profile
design of the Nano-Align3 allows it to be integrated into
existing instrumentation where space is restricted. The
center aperture makes the Nano-Align3 ideal for demanding
microscopy alignment applications which require
long range travel and high precision. Internal position
sensors utilizing proprietary PicoQ® technology provide
picometer and nanoradian precision under closed loop
control. |
Technical Specifications |
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| Ranges of motion (Nano-Align3-100) | |
| Z axis |
100 μm |
| θX and θY | 2 mradian |
| Ranges of motion (Nano-Align3-200) | |
| Z axis | 200 μm |
| θX and θY | 4 mradian |
| Resolution (Nano-Align3-100) | 0.2nm/ 4 nradian |
| Resolution (Nano-Align3-200) | 0.4nm/ 8 nradian |
| Resonant Frequency (Nano-Align3-100) | 600 Hz ±20% |
| Resonant Frequency (Nano-Align3-200) | 450 Hz ±20% |
| Stiffness | 1.0 N/μm |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Aluminum, Titanium, or Invar |
| Controller | Nano-Drive®/Nano-Drive®85 |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-Align3 Series Drawing |
Nano-Align3 Series Catalog Pages |
Related Products |
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