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Nano-Align5 Series
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  • Low profile piezo nanopositioner
  • Five axis motion (XYZ θX θY)
  • 100 μm, 200 μm, or 300 μm motion in XYZ
  • Up to 3.3mrad motion in θX , and up to 4.5 mrad motion in θY
  • Center aperture: 2.6" x 2.6"
  • Closed loop control

Typical Applications
  • Alignment
  • MEMS
  • Nanolithography
  • Metrology

XYZ tip tilt nanopositioning systemfive axis tip tilt piezo stage with manual micrometer stage

Product Description

The Nano-Align5 is a five axis (X, Y, Z, θX , θY) piezo nanopositioning system with a large center aperture. The Nano-Align5 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with “tip” and “tilt” (θXθY). The large center aperture provides excellent access for microscopy optics, sample Nano-Align5 constructed from aluminum. holders, and probe placement. The Nano-Align5 includes internal sensors with proprietary PicoQ® technology for absolute position measurement and picometer/ nanoradian accuracy under closed loop control. The Nano-Align5 can be combined with the MicroStage and Manual MicroStage for long range micropositioning.

Technical Specifications

Ranges of motion (Nano-Align5-100) 100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY)
Ranges of motion (Nano-Align5-200) 200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY)
Ranges of motion (Nano-Align5-300) 300 x 300 x 300 μm x 3.3 mrad (θX) x 4.5 mrad (θY)
Resolution (Nano-Align5-100)
0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY)
Resolution (Nano-Align5-200) 0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY)
Resolution (Nano-Align5-300) 0.6 nm (XYZ), 6.6 nrad (θX), 9.0 nrad (θY)
Resonant Frequencies  
X axis (100/200/300 μm) 450/400/350 Hz ±20%
Y axis (100/200/300 μm) 350/300/250 Hz ±20%
Z axis (100/200/300 μm) 450/350/250 Hz ±20%
Stiffness 1.0 N/μm
Recommended max. load (horizontal)* 0.5 kg
Recommended max. load (vertical)* 0.2 kg
Body Material Aluminum (all models), Invar or Titanium (100 or 200μm only)
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Additional Information

Nano-Align5 Series Drawing
drawing of five axis xyz tip tilt nanopositioner
Nano-Align5 Series Catalog Pages
catalog page for five axis xyz tip tilt nanopositioning system

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mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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