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Nano-Align6 Series
Drawing 
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Related Products
Nano-Align3 Series
Nano-Align5 Series
Nano-Man5
Nano-M3Z
Nano-Theta/H
Accessories
Nano-Drive®
Questions?
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Features
Low profile
Six axis motion (XYZ θX θY θZ)
100 μm x 100 μm x 100 μm x 1.1 mrad x
1.5 mrad x 5 mrad ranges of motion
200 μm x 200 μm x 200 μm x 2.3 mrad x
3.0 mrad x 5 mrad ranges of motion
Center aperture: 35mm diameter
Closed loop control
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Typical Applications
Alignment
MEMS
Nanolithography
Metrology |
Product Description |
The Nano-Align6 is a six axis (X, Y, Z, θX , θY, θZ) nanopositioning
system with a large center aperture. The
Nano-Align6 is ideal for alignment applications which
require three linear axes of motion (X, Y, Z) combined
with rotational motion about each axis. The large
aperture provides excellent access for microscopy optics, sample holders, and probe placement. The Nano-Align6
includes internal sensors on every axis using Mad City
Labs’ proprietary PicoQ® technology for absolute position
measurement and picometer/nanoradian accuracy
under closed loop control.
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Technical Specifications |
| Ranges of motion (Nano-Align6-100) |
100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY) x 5 mrad (θZ) |
| Ranges of motion (Nano-Align6-200) |
200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY) x 5 mrad (θZ) |
| Resolution (Nano-Align6-100) |
0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY), 10 nrad (θZ) |
Resolution (Nano-Align6-200)
|
0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY), 10 nrad (θZ) |
| Resonant Frequencies |
|
| X axis (Nano-Align6-100/Nano-Align6-200) |
450/400 Hz ±20% |
| Y axis (Nano-Align6-100/Nano-Align6-200) |
350/300 Hz ±20% |
| Z axis (Nano-Align6-100/Nano-Align6-200) |
450/350 Hz ±20% |
| Recommended max. load (horizontal)* |
0.5 kg |
| Recommended max. load (vertical)* |
0.2 kg |
| Body Material |
Aluminum, Titanium or Invar |
| Controller |
Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. |
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