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Nanopositioners
>>Nano-Align6 Series

Additional Information
Drawing
Catalog Pages

Related Products
Nano-Align3 Series
Nano-Align5 Series
Nano-Man5
Nano-M3Z
Nano-Theta/H
Accessories
Nano-Drive®

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Features
  • Low profile piezo nanopositioner
  • Six axis motion (XYZ θX θY θZ)
  • 100 μm x 100 μm x 100 μm x 1.1 mrad x 1.5 mrad x 5 mrad ranges of motion
  • 200 μm x 200 μm x 200 μm x 2.3 mrad x 3.0 mrad x 5 mrad ranges of motion
  • Center aperture: 35mm diameter
  • Closed loop control


Typical Applications
  • Alignment
  • MEMS
  • Nanolithography
  • Metrology

six axis piezo stage with xyz tip tilt and in-plane rotation and manual micrometer stage

Product Description

The Nano-Align6 is a six axis (X, Y, Z, θX , θY, θZ) piezo nanopositioning system with a large center aperture. The Nano-Align6 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with rotational motion about each axis. The large aperture provides excellent access for microscopy optics, sample holders, and probe placement. The Nano-Align6 includes internal sensors on every axis using Mad City Labs’ proprietary PicoQ® technology for absolute position measurement and picometer/nanoradian accuracy under closed loop control.



Technical Specifications

Ranges of motion (Nano-Align6-100) 100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY) x 5 mrad (θZ)
Ranges of motion (Nano-Align6-200) 200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY) x 5 mrad (θZ)
Resolution (Nano-Align6-100) 0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY), 10 nrad (θZ)
Resolution (Nano-Align6-200)
0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY), 10 nrad (θZ)
Resonant Frequencies  
X axis (Nano-Align6-100/Nano-Align6-200) 450/400 Hz ±20%
Y axis (Nano-Align6-100/Nano-Align6-200) 350/300 Hz ±20%
Z axis (Nano-Align6-100/Nano-Align6-200) 450/350 Hz ±20%
Recommended max. load (horizontal)* 0.5 kg
Recommended max. load (vertical)* 0.2 kg
Body Material Aluminum, Titanium or Invar
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.


Additional Information

Nano-Align6 Series Drawing
six axis piezo stage drawing

Nano-Align6 Series Catalog Pages
catalog page for six axis nanopositioning system


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mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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