Up
Nano-MZ
Drawing 
Catalog Pages
Related Products
Nano-F Series
Nano-Z Series
Nano-Z500
Nano-P Series
Nano-M3Z
Nano-HSZ
Accessories
Nano-Drive®
Questions?
E-Mail Us |
Features
Compact design
Low profile: 0.8"
Center aperture: 0.25” diameter
Closed loop control
|
Typical Applications
High resolution Z-axis alignment
AFM
Metrology
|
 
Product Description |
The Nano-MZ is a compact Z-axis nanopositioning
system with a small center aperture designed to be easily
integrated into existing instrumentation where space is
restricted. Internal position sensors utilizing proprietary
PicoQ® technology provide absolute, repeatable position
measurement with picometer accuracy under closed loop
control. A related model, the Nano-M3Z, includes
additional “tip” and “tilt” motions (θX ,θY) to the linear
motion in the Z-axis. The Nano-MZ can also be used as
a “building block” with other systems to form complex
nanopositioning assemblies with multi-axis motion - see
the Nano-M350 and the Nano-Man5.
 |
Technical Specifications |
| Range of motion (Z) |
25 μm |
Resolution
|
0.05 nm |
| Resonant Frequency |
1100 Hz ±20% |
| Stiffness |
1.0 N/μm |
| Recommended max. load (horizontal)* |
0.5 kg |
| Body Material |
Aluminum |
| Controller |
Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. |
|
