>>Nano-P Series
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Features
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Typical Applications
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Product Description |
The Nano-P Series are piezo actuated, closed loop, linear
nanopositioners that incorporate a unique flexure hinge design.
The flexure hinge is machined entirely from a single block
of high strength titanium using an advanced electrical
discharge machining process. This hinge, available for
the first time on a tubular piezo nanopositioner, ensures the
highest degree of repeatability and load capability. Unlike
similar looking products on the market, the Nano-P
Series does not have internal Belleville springs. Belleville
springs are not frictionless and therefore cannot provide
the high degree of repeatability of a true nanopositioner. The guiding mechanism of the Nano-P Series is a true
flexure spring - eliminating mechanical friction and stiction.
The Nano-P Series is constructed from invar and
titanium for the best combination of thermal stability
and mechanical strength, making it ideal for the most
demanding nanopositioning and metrology applications. The
Nano-P Series is available in three standard ranges of
motion with integrated position sensors utilizing proprietary
PicoQ® technology to provide absolute, repeatable
position measurement with picometer accuracy under
closed loop control. Custom systems available. |
Noise Plots - Nano-P15 |
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Test Data - Nano-P35 |
 The Nano-P35 closed-loop response to a 3nm peak-to-peak square wave input signal, measured with USB digital interface. Notice the ultra-low, sub-nanometer stability of the system over the time scale. Similar products offered by other companies are unable to achieve such low-noise results. The Nano-P uses a true flexure guiding mechanism and low-noise sensors to achieve high-resolution positioning. |
Technical Specifications |
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| Range of motion (Nano-P15) | 15 μm |
| Range of motion (Nano-P35) |
35 μm |
| Range of motion (Nano-P70) | 70 μm |
| Resolution (15/35/70 μm) | 0.03/0.07/0.14 nm |
| Resonant Frequency | 2.5 kHz ±20% |
| Recommended max. load* | 0.2 kg |
| Body Material | Invar and Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-P Series Drawing |
Nano-P Series Catalog Pages |
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