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Nano-OP Series
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Questions?
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Features
High speed, direct drive
Stackable for multi-axis motion
30, 65, and 100 μm ranges of motion
Closed loop control
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Typical Applications
Interferometry
Nanomanipulation
High speed lens focusing
Fiber optics
NSOM
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Product Description |
The Nano-OP Series is a versatile group of compact
nanopositioners which can be configured to fit into
a wide variety of applications. Individual, single axis
stages may be combined to form multi-axis systems.
The Nano-OP Series are available with 30, 65, and 100
micron ranges of motion. They can be constructed from
aluminum, invar, or titanium and can be customized
to suit unique requirements. Internal position sensors
utilizing proprietary PicoQ® technology provide absolute,
repeatable position measurement with picometer accuracy
under closed loop control.
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Technical Specifications |
| Range of motion (Nano-OP30) |
30 μm |
Range of motion (Nano-OP65)
|
65 μm |
| Range of motion (Nano-OP100) |
100 μm |
| Resolution (30/65/100 μm) |
0.06/0.13/0.2 nm |
| Resonant Frequency |
4 kHz ±20% |
| Resonant Frequency (100g load) |
2 kHz ±20% |
| Stiffness |
3.0 N/μm ±20% |
| θ roll, θ pitch (typical) |
≤1 μrad |
| θ yaw (typical) |
≤2 μrad |
| Recommended max. load (horizontal)* |
1.0 kg |
| Recommended max. load (vertical)* |
0.5 kg |
| Body Material |
Al, Invar or Titanium |
| Controller |
Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. |
Nano-OP30 Position Noise Spectrum
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