Home Products Applications Catalog Custom/OEM Technical Information News International Sales Repairs Contact

Nanopositioners
>>Nano-LR200

Additional Information
Drawing
Catalog Pages

Related Products
Nano-OP Series
Nano-YT500
Accessories
SPM Accessories
Nano-Drive®

Questions?
E-Mail Us


Features
  • Long range single axis piezo nanopositioner
  • Less than 5 nm out of plane motion
  • Low profile design
  • Closed loop control


Typical Applications
  • Surface metrology
  • Wafer scanning and alignment
  • Optical alignment


Product Description

The Nano-LR200 is designed to provide long range, single axis translation with an absolute minimum of out-of-axis motion. The unique design of the Nano- LR200 produces less than 5 nm of out-of-plane motion; measured over the entire moving platform throughout the 200 μm range of motion. The Nano-LR200 sets the highest level of single axis precision and positioning performance. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with sub-nanometer accuracy under closed loop control. The Nano-LR200 is ideally suited for applications that require extreme parallelism, such as metrology, AFM and MEMS.



Technical Specifications

Range of motion (X) 200 μm
Resolution
0.4 nm
Resonant Frequency 500 Hz ±20%
Resonant Frequency (100g load) 200 Hz ±20%
Stiffness 0.2 N/μm
θ roll, θ pitch (typical) ≤0.3 μrad
θ yaw (typical) ≤0.3 μrad
Recommended max. load (horizontal)* 0.5 kg
Recommended max. load (vertical)* 0.2 kg
Body Material Al
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.


Additional Information

Nano-LR200 Drawing

Nano-LR200 Catalog Pages


Related Products



mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

Copyright © 2017