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Nano-LR200
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Related Products
Nano-OP Series
Nano-YT500
Accessories
Nano-Drive®
Questions?
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Features
Long range single axis motion: 200 μm
Less than 5 nm out of plane motion
Low profile design
Closed loop control
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Typical Applications
Surface metrology
Wafer scanning and alignment
Optical alignment
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Product Description |
The Nano-LR200 is designed to provide long range,
single axis translation with an absolute minimum of
out-of-axis motion. The unique design of the Nano-
LR200 produces less than 5 nm of out-of-plane motion;
measured over the entire moving platform throughout
the 200 μm range of motion. The Nano-LR200 sets the
highest level of single axis precision and positioning performance.
Internal position sensors utilizing proprietary
PicoQ® technology provide absolute, repeatable position measurement with sub-nanometer accuracy under
closed loop control. The Nano-LR200 is ideally suited
for applications that require extreme parallelism, such as
metrology, AFM and MEMS.
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Technical Specifications |
| Range of motion (X) |
200 μm |
Resolution
|
0.4 nm |
| Resonant Frequency |
500 Hz ±20% |
| Resonant Frequency (100g load) |
200 Hz ±20% |
| Stiffness |
0.2 N/μm |
| θ roll, θ pitch (typical) |
≤0.3 μrad |
| θ yaw (typical) |
≤0.3 μrad |
| Recommended max. load (horizontal)* |
0.5 kg |
| Recommended max. load (vertical)* |
0.2 kg |
| Body Material |
Al |
| Controller |
Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. |
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