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Nano-HSZ
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Related Products
Nano-HS Series
Nano-Z Series
Nano-MZ
Questions?
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Features
Single axis (Z) motion
Step response less than 3 milliseconds
Full range scans up to 500 Hz
Closed loop control
Combine with Nano-OP Series for
multi-axis configurations
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Typical Applications
High speed, high resolution positioning
Metrology
Interferometry
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Product Description |
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The Nano-HSZ is a high speed single axis (Z-axis) precision
nanopositioning system. Internal position sensors
utilizing proprietary PicoQ™ technology provide absolute,
repeatable position measurement with picometer accuracy
under closed loop control. The Nano-HSZ offers a compact
footprint, ultra low noise characteristics, and a resonant
frequency greater than 7 kHz. These characteristics
make it ideal for applications that require noise floors
less than 10 picometers and/or high speed performance.
The step response of the Nano-HSZ is on the order of a
few milliseconds while the full amplitude scanning rate
can reach 500Hz. |
Nano-HSZ Position Noise Spectrum
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Technical Specifications |
| Range of motion (Z) |
10 μm |
Resolution
|
0.01 nm |
| Resonant Frequency |
7.5 kHz ±20% |
| Scanning Speed (full amplitude) |
up to 500 Hz |
| Stiffness |
12 N/μm |
| Recommended max. load (horizontal)* |
0.1 kg |
| Recommended max. load (vertical)* |
0.1 kg |
| Body Material |
Al, Invar or Titanium |
| Controller |
Nano-Drive™ |
| * Larger load requirements should be discussed with our engineering staff. |
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