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Nano-HS Series
Nano-ZS Series
SPM Accessories

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  • Single axis (Z) piezo nanopositionern
  • Step response less than 1 millisecond
  • Scans up to 500 Hz
  • Closed loop control
  • Combine with Nano-OP Series for multi-axis configurations

Typical Applications
  • High speed, high resolution positioning
  • Metrology
  • Interferometry

Product Description

The Nano-HSZ is a high speed single axis (Z-axis) precision piezo nanopositioning system. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-HSZ offers a compact footprint, ultra low noise characteristics, and a resonant frequency greater than 7 kHz. These characteristics make it ideal for applications that require noise floors less than 10 picometers and/or high speed performance. With the step response time of the Nano-HSZ set to less than 1 millisecond for extremely high speed applications, scan frequencies up to 500Hz can be achieved.

Nano-HSZ Position Noise Spectrum

Technical Specifications

Range of motion (Z) 10 μm
0.01 nm
Resonant Frequency 7.5 kHz ±20%
Scanning Speed (full amplitude) up to 500 Hz
Stiffness 12 N/μm
Recommended max. load (horizontal)* 0.1 kg
Recommended max. load (vertical)* 0.1 kg
Body Material Al, Invar or Titanium
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Additional Information

Nano-HSZ Drawing

Nano-HSZ Catalog Pages

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mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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