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Additional Information
Drawing (flat top)
Drawing (groove top)
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  • Compact piezo nanopositioner
  • Low cost
  • 200 μm three axis motion (XYZ)
  • Closed loop control
  • True flexure guided motion
Typical Applications
  • Optical fiber alignment
  • Hybrid positioning systems
  • Nanofabrication

three axis nanopositioner with top surface alignment grooves for optical accessoriesthree axis nanopositioner shown with two axis manual micrometer stage

Product Description

The Nano-3D200 is a compact three axis (XYZ) piezo nanopositioning system constructed from aluminum. The compact design of the Nano-3D200 allows it to be easily integrated with coarse positioning stages and standard optical fixturing accessories. Internal position sensors combine with the closed loop controller to provide absolute, repeatable position measurement and long term stability. Independent flexure guided motion for each axis provides mechanical isolation and ensures that alignment adjustments can be done with minimum crosstalk between axes. A wireless 3-axis joystick controller is available as a convenience for fast, precise manual alignment without computer programming.

Technical Specifications

Ranges of motion (XYZ) 200 μm
1 nm
Resonant Frequency (X) 150 Hz ±20%
Resonant Frequency (Y) 150 Hz ±20%
Resonant Frequency (Z) 500 Hz ±20%
Stiffness 1.0 N/μm
Recommended max. load (horizontal)* 0.5 kg
Recommended max. load (vertical)* 0.2 kg
Body Material Aluminum
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Additional Information

Nano-3D200 Drawing (flat top)
three axis piezo stage drawing

Nano-3D200 Drawing (groove top)
three axis piezo stage drawing with groove top

Nano-3D200 Catalog Pages
Nano-3D200 catalog pages


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mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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