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Nanopositioners
Vacuum Compatible Instruments
>>Nano-UHV50

Additional Information
Drawing
Catalog Pages

Related Products
Nano-UHV100
Nano-UHV200
MadMotor®-UHV
Accessories
Nano-Drive®
Custom

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Features
  • UHV compatible piezo nanopositioner
  • Two axis (XY)
  • 50 μm x 50 μm ranges of motion
  • Bakeable to 100° C
  • Titanium or invar construction
  • Closed loop PicoQ® control


Typical Applications
  • X-ray, VUV, and optical microscopy
  • Surface metrology
  • UHV atomic scale microscopy
  • Special designs - just contact us with your requirements



Product Description

The Nano-UHV50 is a two axis UHV compatible piezo nanopositioning system constructed from titanium or invar. Made entirely from UHV compatible materials, the Nano-UHV50 is bakeable to 100°C for vacuum applications in the 10-10 Torr range. A 1 inch (25mm) center aperture provides an optical pathway or access for sample holders. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy. Cable lengths and connectors are customized for the actual installation. Connector wiring is compatible with Accu-Glass Products electrical feedthrough flanges - compatibility with other types of flanges may be requested.

Note: Customized UHV stages are always welcome - just email or call to discuss your special requirements.

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Technical Specifications

Range of motion (X) 50 μm
Range of motion (Y) 50 μm
Resolution (XY)
0.1 nm
Resonant Frequency (X) 500 Hz ±20%
Resonant Frequency (Y) 250 Hz ±20%
Stiffness 0.5 N/μm
θ roll, θ pitch (typical) ≤1 μrad
θ yaw (typical) ≤3 μrad
Recommended max. load (horizontal)* 0.5 kg
Recommended max. load (vertical)* 0.2 kg
Body Material Invar or Titanium
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.


Additional Information

Nano-UHV50 Drawing

Nano-UHV50 Catalog Pages


Related Products



mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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