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Nano-UHV50
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Nano-UHV100
Nano-UHV200
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Features
UHV compatible construction
Two axis (XY)
50 μm x 50 μm ranges of motion
Bakeable to 100° C
Titanium or invar construction
Closed loop control
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Typical Applications
X-ray, VUV, and optical microscopy
Surface metrology
UHV atomic scale microscopy
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Product Description |
The Nano-UHV50 is a two axis UHV compatible nanopositioning
system constructed from titanium or invar.
Made entirely from UHV compatible materials, the
Nano-UHV50 is bakeable to 100°C for vacuum applications
in the 10-10 Torr range. A 1 inch (25mm) center
aperture provides an optical pathway or access for sample
holders. Internal position sensors utilizing proprietary PicoQ™ technology provide absolute, repeatable position
measurement with picometer accuracy. Cable lengths
and connectors are customized for the actual installation.
Connector wiring is compatible with MDC electrical
feedthrough flanges - compatibility with other types of
flanges may be requested.
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Technical Specifications |
| Range of motion (Z) |
50 μm |
| Range of motion (Y) |
50 μm |
Resolution (XY)
|
0.1 nm |
| Resonant Frequency (X) |
500 Hz ±20% |
| Resonant Frequency (Y) |
250 Hz ±20% |
| Stiffness |
0.5 N/μm |
| θ roll, θ pitch (typical) |
≤1 μrad |
| θ yaw (typical) |
≤3 μrad |
| Recommended max. load (horizontal)* |
0.5 kg |
| Recommended max. load (vertical)* |
0.2 kg |
| Body Material |
Invar or Titanium |
| Controller |
Nano-Drive™ |
| * Larger load requirements should be discussed with our engineering staff. |
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