Nano-UHV100
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Features
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Typical Applications
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Product Description |
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The Nano-UHV100 is a two axis UHV compatible
nanopositioning stage constructed from titanium or invar.
Made entirely from UHV compatible materials, the
Nano-UHV100 can be baked to 100°C for vacuum applications
in the 10-10 Torr range. The large (2.6” x 2.6”)
center aperture makes the Nano-UHV100 ideal for vacuum
microscopy applications. Internal position sensors utilizing proprietary PicoQ® technology provide absolute,
repeatable position measurement with picometer accuracy.
Cable lengths and connectors are customized for
the actual installation. Connector wiring is compatible with Accu-Glass Products electrical
feedthrough flanges - compatibility with other types of flanges may be requested. Note: Customized UHV stages are always welcome - just email or call to discuss your special requirements.  |
Technical Specifications |
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| Range of motion (X) | 100 μm |
| Range of motion (Y) | 100 μm |
| Resolution (XY) |
0.2 nm |
| Resonant Frequency (X) | 500 Hz ±20% |
| Resonant Frequency (Y) | 250 Hz ±20% |
| Stiffness | 1.0 N/μm |
| θ roll, θ pitch (typical) | ≤1 μrad |
| θ yaw (typical) | ≤3 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Invar or Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-UHV100 Drawing |
Nano-UHV100 Catalog Pages |
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