Up
Nano-UHV100
Drawing
Catalog Pages
Related Products
Nano-UHV50
Nano-UHV200
Questions?
E-Mail Us |
Features
UHV compatible construction
Two axis (XY), large aperture
100 μm x 100 μm ranges of motion
Bakeable to 100° C
Titanium or invar construction
Closed loop control
|
Typical Applications
X-ray, VUV, and optical microscopy
Surface metrology
UHV atomic scale microscopy
|
Product Description |
The Nano-UHV100 is a two axis UHV compatible
nanopositioning stage constructed from titanium or invar.
Made entirely from UHV compatible materials, the
Nano-UHV100 can be baked to 100°C for vacuum applications
in the 10-10 Torr range. The large (2.6” x 2.6”)
center aperture makes the Nano-UHV100 ideal for vacuum
microscopy applications. Internal position sensors utilizing proprietary PicoQ™ technology provide absolute,
repeatable position measurement with picometer accuracy.
Cable lengths and connectors are customized for
the actual installation. Connector wiring is compatible
with MDC electrical feedthrough flanges - compatibility
with other types of flanges may be requested.
 |
Technical Specifications |
| Range of motion (X) |
100 μm |
| Range of motion (Y) |
100 μm |
Resolution (XY)
|
0.2 nm |
| Resonant Frequency (X) |
500 Hz ±20% |
| Resonant Frequency (Y) |
250 Hz ±20% |
| Stiffness |
1.0 N/μm |
| θ roll, θ pitch (typical) |
≤1 μrad |
| θ yaw (typical) |
≤3 μrad |
| Recommended max. load (horizontal)* |
0.5 kg |
| Recommended max. load (vertical)* |
0.2 kg |
| Body Material |
Invar or Titanium |
| Controller |
Nano-Drive™ |
| * Larger load requirements should be discussed with our engineering staff. |
|
