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Nanopositioners
Vacuum Compatible Instruments
>>Nano-UHV100

Additional Information
Drawing
Catalog Pages

Related Products
Nano-UHV50
Nano-UHV200
MadMotor®-UHV
Accessories
Nano-Drive®
Custom

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Features
  • UHV compatible piezo nanopositioner
  • Two axis (XY), large aperture
  • 100 μm x 100 μm ranges of motion
  • Bakeable to 100° C
  • Titanium or invar construction
  • Closed loop PicoQ® control


Typical Applications
  • X-ray, VUV, and optical microscopy
  • Surface metrology
  • UHV atomic scale microscopy
  • Special designs - just contact us with your requirements



Product Description

The Nano-UHV100 is a two axis UHV compatible piezo nanopositioning stage constructed from titanium or invar. Made entirely from UHV compatible materials, the Nano-UHV100 can be baked to 100°C for vacuum applications in the 10-10 Torr range. The large (2.6” x 2.6”) center aperture makes the Nano-UHV100 ideal for vacuum microscopy applications. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy. Cable lengths and connectors are customized for the actual installation. Connector wiring is compatible with Accu-Glass Products electrical feedthrough flanges - compatibility with other types of flanges may be requested.

Note: Customized UHV stages are always welcome - just email or call to discuss your special requirements.



Technical Specifications

Range of motion (X) 100 μm
Range of motion (Y) 100 μm
Resolution (XY)
0.2 nm
Resonant Frequency (X) 500 Hz ±20%
Resonant Frequency (Y) 250 Hz ±20%
Stiffness 1.0 N/μm
θ roll, θ pitch (typical) ≤1 μrad
θ yaw (typical) ≤3 μrad
Recommended max. load (horizontal)* 0.5 kg
Recommended max. load (vertical)* 0.2 kg
Body Material Invar or Titanium
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.


Additional Information

Nano-UHV100 Drawing

Nano-UHV100 Catalog Pages


Related Products



mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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