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Nano-UHV200
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Nano-UHV50
Nano-UHV100
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Features
UHV compatible construction
Three axis (XYZ)
200 μm x 200 μm x 200 μm motion
Bakeable to 100° C
Titanium and 316SS construction
Closed loop control
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Typical Applications
X-ray, VUV, and optical microscopy
Surface metrology
UHV atomic scale microscopy
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Product Description |
The Nano-UHV200 is a three axis UHV compatible
nanopositioning system constructed from titanium and
316 stainless steel. Made entirely from non-magnetic
UHV compatible materials, the Nano-UHV200 is
bakeable to 100°C for vacuum applications in the 10-10
Torr range. A 2 inch x 2 inch center aperture provides
an optical pathway or access for sample holders.
Internal position sensors utilizing proprietary PicoQ™
technology provide absolute, repeatable position measurement
with picometer accuracy. Cable lengths and
connectors are customized for the actual installation.
Connector wiring is compatible with MDC electrical
feedthrough flanges - compatibility with other types of
flanges may be requested.
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Technical Specifications |
| Range of motion (X) |
200 μm |
| Range of motion (Y) |
200 μm |
| Range of motion (Z) |
200 μm |
| Resolution (XYZ) |
0.4 nm |
| Resonant Frequency (X) |
300 Hz ±20% |
| Resonant Frequency (Y) |
150 Hz ±20% |
| Resonant Frequency (Z) |
175 Hz ±20% |
| Stiffness |
2 N/μm |
| θ roll, θ pitch (typical) |
≤1 μrad |
| θ yaw (typical) |
≤3 μrad |
| Recommended max. load (horizontal)* |
0.5 kg |
| Recommended max. load (vertical)* |
0.2 kg |
| Body Material |
Titanium and 316 SS |
| Controller |
Nano-Drive™ |
| * Larger load requirements should be discussed with our engineering staff. |
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