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Nano-Theta
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Related Products
Nano-Theta/H
Nano-MTA Series
Accessories
Nano-Drive®
Questions?
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Features
Precision rotation: 2 mradians range
Accessible and well defined axis of rotation
Mount in any orientation
High resolution: 4 nanoradians
Closed loop control
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Typical Applications
Laser beam scanning
Lithography
FBG writing
Interferometry
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Product Description |
The Nano-Theta is a unique piezo-actuated rotational
stage having 2 milliradians of total motion. With nanoradian
resolution, the Nano-Theta is designed for applications
in lithography, optical disk manufacturing, and
laser beam tracking or scanning. The innovative design
of the Nano-Theta incorporates a readily accessible and well-defined axis of rotation which allows a mirror
to be mounted so that it is co-planar with the axis of
rotation. Internal position sensors utilizing proprietary
PicoQ® technology provide absolute, repeatable position
measurement with nanoradian accuracy under closed
loop control.
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Technical Specifications |
| Range of motion |
2.0 mradians |
Resolution
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4 nradians |
| Resonant Frequency (unloaded). |
2 kHz ±20% |
| Body Material |
Al or Invar |
| Controller |
Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. |
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