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Nano-Align5 Series
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Related Products
Nano-Align3 Series
Nano-Align6 Series
Nano-Man5
Nano-M3Z
Manual MicroStage Series
MicroStage Series
Accessories
Nano-Drive®
Questions?
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Features
Low profile
Five axis motion (XYZ θX θY)
100 μm, 200 μm, or 300 μm motion in
XYZ
Up to 3.3mrad motion in θX , and up to
4.5 mrad motion in θY
Center aperture: 2.6" x 2.6"
Closed loop control
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Typical Applications
Alignment
MEMS
Nanolithography
Metrology |
 
Product Description |
The Nano-Align5 is a five axis (X, Y, Z, θX , θY) nanopositioning
system with a large center aperture. The
Nano-Align5 is ideal for alignment applications which
require three linear axes of motion (X, Y, Z) combined
with “tip” and “tilt” (θXθY). The large center aperture
provides excellent access for microscopy optics, sample
Nano-Align5 constructed from aluminum.
holders, and probe placement. The Nano-Align5 includes
internal sensors with proprietary PicoQ® technology
for absolute position meas5rement and picometer/
nanoradian accuracy under closed loop control. The
Nano-Align5 can be combined with the MicroStage and
Manual MicroStage for long range micropositioning.
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Technical Specifications |
| Ranges of motion (Nano-Align5-100) |
100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY) |
| Ranges of motion (Nano-Align5-200) |
200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY) |
| Ranges of motion (Nano-Align5-300) |
300 x 300 x 300 μm x 3.3 mrad (θX) x 4.5 mrad (θY) |
Resolution (Nano-Align5-100)
|
0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY) |
| Resolution (Nano-Align5-200) |
0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY) |
| Resolution (Nano-Align5-300) |
0.6 nm (XYZ), 6.6 nrad (θX), 9.0 nrad (θY) |
| Resonant Frequencies |
|
| X axis (100/200/300 μm) |
450/400/350 Hz ±20% |
| Y axis (100/200/300 μm) |
350/300/250 Hz ±20% |
| Z axis (100/200/300 μm) |
450/350/250 Hz ±20% |
| Stiffness |
1.0 N/μm |
| Recommended max. load (horizontal)* |
0.5 kg |
| Recommended max. load (vertical)* |
0.2 kg |
| Body Material |
Aluminum or Invar |
| Controller |
Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. |
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