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Nano-Align Series
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Related Products
Nano-Align3 Series
Nano-Man5
Nano-M3Z
Questions?
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Features
Lowest profile
Five axis motion (X, Y, Z, θX, θY,)
100 μm x 100 μm x 100 μm x 1.1 mrad x
1.5 mrad ranges of motion
200 μm x 200 μm x 200 μm x 2.3 mrad x
3.0 mrad ranges of motion
Center aperture: 2.6" x 2.6"
Closed loop control
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Typical Applications
Alignment
MEMS
Nanolithography
SEM |
Product Description |
The Nano-Align is a five axis (X, Y, Z, θX , θY) nanopositioning
system with a large center aperture. The
Nano-Align is ideal for alignment applications which
require three linear axes of motion (X, Y, Z) combined
with “tip” and “tilt” (θXθY). The large aperture provides
excellent access for microscopy optics, sample holders, and probe placement. The Nano-Align includes internal
sensors with proprietary PicoQ™ technology for absolute
position measurement and picometer/nanoradian accuracy
under closed loop control..
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Technical Specifications |
| Ranges of motion (Nano-Align100) |
100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY) |
Ranges of motion (Nano-Align200)
|
200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY) |
| Resolution (Nano-Align100) |
0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY) |
| Resolution (Nano-Align200) |
0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY) |
| Resonant Frequencies |
|
| X axis (Nano-Align100/Nano-Align200) |
450/400 Hz ±20% |
| Y axis (Nano-Align100/Nano-Align200) |
350/300 Hz ±20% |
| Z axis (Nano-Align100/Nano-Align200) |
450/350 Hz ±20% |
| Recommended max. load (horizontal)* |
0.5 kg |
| Recommended max. load (vertical)* |
0.2 kg |
| Body Material |
Al or Invar |
| Controller |
Nano-Drive™ |
| * Larger load requirements should be discussed with our engineering staff. |
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