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Nano-Align Series
   Drawing
   Catalog Pages

Related Products
   Nano-Align3 Series
   Nano-Man5
   Nano-M3Z

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Features
  • Lowest profile
  • Five axis motion (X, Y, Z, θX, θY,)
  • 100 μm x 100 μm x 100 μm x 1.1 mrad x 1.5 mrad ranges of motion
  • 200 μm x 200 μm x 200 μm x 2.3 mrad x 3.0 mrad ranges of motion
  • Center aperture: 2.6" x 2.6"
  • Closed loop control


  • Typical Applications
  • Alignment
  • MEMS
  • Nanolithography
  • SEM



  • Product Description

    The Nano-Align is a five axis (X, Y, Z, θX , θY) nanopositioning system with a large center aperture. The Nano-Align is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with “tip” and “tilt” (θXθY). The large aperture provides excellent access for microscopy optics, sample holders, and probe placement. The Nano-Align includes internal sensors with proprietary PicoQ™ technology for absolute position measurement and picometer/nanoradian accuracy under closed loop control..



    Technical Specifications

    Ranges of motion (Nano-Align100)

    100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY)

    Ranges of motion (Nano-Align200)
    200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY)
    Resolution (Nano-Align100) 0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY)
    Resolution (Nano-Align200) 0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY)
    Resonant Frequencies  
    X axis (Nano-Align100/Nano-Align200) 450/400 Hz ±20%
    Y axis (Nano-Align100/Nano-Align200) 350/300 Hz ±20%
    Z axis (Nano-Align100/Nano-Align200) 450/350 Hz ±20%
    Recommended max. load (horizontal)* 0.5 kg
    Recommended max. load (vertical)* 0.2 kg
    Body Material Al or Invar
    Controller Nano-Drive™
    * Larger load requirements should be discussed with our engineering staff.


    Additional Information

    Nano-Align Series Drawing


    Nano-Align Series Catalog Pages


    Related Products

  • Nano-Align3 Series
  • Nano-Man5
  • Nano-M3Z


  • mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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